Abstract
A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.
Original language | English |
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Pages (from-to) | 849-854 |
Number of pages | 6 |
Journal | Instruments and Experimental Techniques |
Volume | 49 |
Issue number | 6 |
DOIs | |
Publication status | Published - Dec 2006 |
Externally published | Yes |
ASJC Scopus subject areas
- Engineering (miscellaneous)
- Instrumentation