An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method

Abstract

A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.

Original language	English
Pages (from-to)	849-854
Number of pages	6
Journal	Instruments and Experimental Techniques
Volume	49
Issue number	6
DOIs	https://doi.org/10.1134/S0020441206060157
Publication status	Published - Dec 2006
Externally published	Yes

ASJC Scopus subject areas

Engineering (miscellaneous)
Instrumentation

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10.1134/S0020441206060157

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An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. / Portnov, S. A.; Yashchenok, A. M.; Gubskii, A. S.; Gorin, D. A.; Neveshkin, A. A.; Klimov, B. N.; Nefedov, A. A.; Lomova, M. V.

In: Instruments and Experimental Techniques, Vol. 49, No. 6, 12.2006, p. 849-854.

Research output: Contribution to journal › Article › peer-review

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abstract = "A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.",

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AU - Gubskii, A. S.

AU - Gorin, D. A.

AU - Neveshkin, A. A.

AU - Klimov, B. N.

AU - Nefedov, A. A.

AU - Lomova, M. V.

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