An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method

S. A. Portnov, A. M. Yashchenok, A. S. Gubskii, D. A. Gorin, A. A. Neveshkin, B. N. Klimov, A. A. Nefedov, M. V. Lomova

Research output: Contribution to journal › Article

Abstract

A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.

Original language	English
Pages (from-to)	849-854
Number of pages	6
Journal	Instruments and Experimental Techniques
Volume	49
Issue number	6
DOIs	https://doi.org/10.1134/S0020441206060157
Publication status	Published - Dec 2006
Externally published	Yes

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ASJC Scopus subject areas

Engineering (miscellaneous)
Instrumentation

Cite this

Portnov, S. A., Yashchenok, A. M., Gubskii, A. S., Gorin, D. A., Neveshkin, A. A., Klimov, B. N., ... Lomova, M. V. (2006). An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. Instruments and Experimental Techniques, 49(6), 849-854. https://doi.org/10.1134/S0020441206060157

An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. / Portnov, S. A.; Yashchenok, A. M.; Gubskii, A. S.; Gorin, D. A.; Neveshkin, A. A.; Klimov, B. N.; Nefedov, A. A.; Lomova, M. V.

In: Instruments and Experimental Techniques, Vol. 49, No. 6, 12.2006, p. 849-854.

Research output: Contribution to journal › Article

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Access to Document

10.1134/S0020441206060157