An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method

S. A. Portnov, A. M. Yashchenok, A. S. Gubskii, D. A. Gorin, A. A. Neveshkin, B. N. Klimov, A. A. Nefedov, M. V. Lomova

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16 Citations (Scopus)

Abstract

A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.

Original languageEnglish
Pages (from-to)849-854
Number of pages6
JournalInstruments and Experimental Techniques
Volume49
Issue number6
DOIs
Publication statusPublished - Dec 2006
Externally publishedYes

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Instrumentation

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    Portnov, S. A., Yashchenok, A. M., Gubskii, A. S., Gorin, D. A., Neveshkin, A. A., Klimov, B. N., Nefedov, A. A., & Lomova, M. V. (2006). An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. Instruments and Experimental Techniques, 49(6), 849-854. https://doi.org/10.1134/S0020441206060157