Abstract
A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.
| Original language | English |
|---|---|
| Pages (from-to) | 849-854 |
| Number of pages | 6 |
| Journal | Instruments and Experimental Techniques |
| Volume | 49 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - Dec 2006 |
| Externally published | Yes |
ASJC Scopus subject areas
- Engineering (miscellaneous)
- Instrumentation
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Portnov, S. A., Yashchenok, A. M., Gubskii, A. S., Gorin, D. A., Neveshkin, A. A., Klimov, B. N., Nefedov, A. A., & Lomova, M. V. (2006). An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. Instruments and Experimental Techniques, 49(6), 849-854. https://doi.org/10.1134/S0020441206060157