An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method

S. A. Portnov, A. M. Yashchenok, A. S. Gubskii, D. A. Gorin, A. A. Neveshkin, B. N. Klimov, A. A. Nefedov, M. V. Lomova

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Abstract

A POLYION-1M automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method is described. The design, the scheme of connection with a computer, and software of the setup are described. The results of comparison of the parameters of the setup developed and its foreign analog are analyzed. Nanodimensional films with a varied number of layers on silicon substrates were produced. The refractive index and thickness of films were determined by the ellipsometry technique.

Original languageEnglish
Pages (from-to)849-854
Number of pages6
JournalInstruments and Experimental Techniques
Volume49
Issue number6
DOIs
Publication statusPublished - Dec 2006
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Instrumentation

Cite this

Portnov, S. A., Yashchenok, A. M., Gubskii, A. S., Gorin, D. A., Neveshkin, A. A., Klimov, B. N., ... Lomova, M. V. (2006). An automated setup for production of nanodimensional coatings by the polyelectrolyte self-assembly method. Instruments and Experimental Techniques, 49(6), 849-854. https://doi.org/10.1134/S0020441206060157