Amplitude control system of drive-mode oscillations of MEMS gyroscopes

Abstract

Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.

Original language	English
Article number	012009
Journal	IOP Conference Series: Materials Science and Engineering
Volume	516
Issue number	1
DOIs	https://doi.org/10.1088/1757-899X/516/1/012009
Publication status	Published - 26 Apr 2019
Event	3rd International Conference on Cognitive Robotics - Tomsk, Russian Federation Duration: 22 Nov 2018 → 24 Nov 2018

ASJC Scopus subject areas

Materials Science(all)
Engineering(all)

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10.1088/1757-899X/516/1/012009

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title = "Amplitude control system of drive-mode oscillations of MEMS gyroscopes",

abstract = "Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.",

author = "Nesterenko, {T. G.} and Barbin, {E. S.} and Baranov, {P. F.} and Hao, {Lo Van}",

year = "2019",

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journal = "IOP Conference Series: Materials Science and Engineering",

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AU - Nesterenko, T. G.

AU - Barbin, E. S.

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AU - Hao, Lo Van

PY - 2019/4/26

Y1 - 2019/4/26

N2 - Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.

AB - Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.

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Amplitude control system of drive-mode oscillations of MEMS gyroscopes

Abstract

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