Amplitude control system of drive-mode oscillations of MEMS gyroscopes

Research output: Contribution to journalConference article

Abstract

Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.

Original languageEnglish
Article number012009
JournalIOP Conference Series: Materials Science and Engineering
Volume516
Issue number1
DOIs
Publication statusPublished - 26 Apr 2019
Event3rd International Conference on Cognitive Robotics - Tomsk, Russian Federation
Duration: 22 Nov 201824 Nov 2018

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Gyroscopes
MEMS
Control systems
Capacitance
Electrostatic force
Angular velocity
Natural frequencies

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

Cite this

Amplitude control system of drive-mode oscillations of MEMS gyroscopes. / Nesterenko, T. G.; Barbin, E. S.; Baranov, P. F.; Hao, Lo Van.

In: IOP Conference Series: Materials Science and Engineering, Vol. 516, No. 1, 012009, 26.04.2019.

Research output: Contribution to journalConference article

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