Amplitude control system of drive-mode oscillations of MEMS gyroscopes

Abstract

Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.

Original language	English
Article number	012009
Journal	IOP Conference Series: Materials Science and Engineering
Volume	516
Issue number	1
DOIs	https://doi.org/10.1088/1757-899X/516/1/012009
Publication status	Published - 26 Apr 2019
Event	3rd International Conference on Cognitive Robotics - Tomsk, Russian Federation Duration: 22 Nov 2018 → 24 Nov 2018

ASJC Scopus subject areas

Materials Science(all)
Engineering(all)

Access to Document

10.1088/1757-899X/516/1/012009

Fingerprint Dive into the research topics of 'Amplitude control system of drive-mode oscillations of MEMS gyroscopes'. Together they form a unique fingerprint.

Cite this

Nesterenko, T. G., Barbin, E. S., Baranov, P. F., & Hao, L. V. (2019). Amplitude control system of drive-mode oscillations of MEMS gyroscopes. IOP Conference Series: Materials Science and Engineering, 516(1), [012009]. https://doi.org/10.1088/1757-899X/516/1/012009

@article{dd91b5587c4f46b08a4bc2803b39cf74,

title = "Amplitude control system of drive-mode oscillations of MEMS gyroscopes",

abstract = "Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.",

author = "Nesterenko, {T. G.} and Barbin, {E. S.} and Baranov, {P. F.} and Hao, {Lo Van}",

year = "2019",

month = apr,

day = "26",

doi = "10.1088/1757-899X/516/1/012009",

language = "English",

volume = "516",

journal = "IOP Conference Series: Materials Science and Engineering",

issn = "1757-8981",

publisher = "IOP Publishing Ltd.",

number = "1",

note = "3rd International Conference on Cognitive Robotics ; Conference date: 22-11-2018 Through 24-11-2018",

}

TY - JOUR

T1 - Amplitude control system of drive-mode oscillations of MEMS gyroscopes

AU - Nesterenko, T. G.

AU - Barbin, E. S.

AU - Baranov, P. F.

AU - Hao, Lo Van

PY - 2019/4/26

Y1 - 2019/4/26

N2 - Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.

AB - Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.

UR - http://www.scopus.com/inward/record.url?scp=85065601277&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85065601277&partnerID=8YFLogxK

U2 - 10.1088/1757-899X/516/1/012009

DO - 10.1088/1757-899X/516/1/012009

M3 - Conference article

AN - SCOPUS:85065601277

VL - 516

JO - IOP Conference Series: Materials Science and Engineering

JF - IOP Conference Series: Materials Science and Engineering

SN - 1757-8981

IS - 1

M1 - 012009

T2 - 3rd International Conference on Cognitive Robotics

Y2 - 22 November 2018 through 24 November 2018

ER -