Abstract
Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.
| Original language | English |
|---|---|
| Article number | 012009 |
| Journal | IOP Conference Series: Materials Science and Engineering |
| Volume | 516 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 26 Apr 2019 |
| Event | 3rd International Conference on Cognitive Robotics - Tomsk, Russian Federation Duration: 22 Nov 2018 → 24 Nov 2018 |
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ASJC Scopus subject areas
- Materials Science(all)
- Engineering(all)
Cite this
Amplitude control system of drive-mode oscillations of MEMS gyroscopes. / Nesterenko, T. G.; Barbin, E. S.; Baranov, P. F.; Hao, Lo Van.
In: IOP Conference Series: Materials Science and Engineering, Vol. 516, No. 1, 012009, 26.04.2019.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - Amplitude control system of drive-mode oscillations of MEMS gyroscopes
AU - Nesterenko, T. G.
AU - Barbin, E. S.
AU - Baranov, P. F.
AU - Hao, Lo Van
PY - 2019/4/26
Y1 - 2019/4/26
N2 - Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.
AB - Two operating modes can be singled out for a gyroscope, namely drive mode and sense mode. During the drive mode, electrostatic forces of gyroscope enable drive-mode harmonic oscillations of a moving mass. With the angular velocity and translational acceleration of an object in the sense mode, a moving mass moves due to the Coriolis and inertial forces, thereby causing changes in capacitances of comb structures. Resultant capacitance changes are proportional to parameters to be measured, i.e. the rotational rate and linear acceleration. The aim of this work is to investigate and create a system of amplitude control of drive-mode oscillations. To improve the mems efficiency, drive-mode oscillations are excited at a resonant frequency.
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UR - http://www.scopus.com/inward/citedby.url?scp=85065601277&partnerID=8YFLogxK
U2 - 10.1088/1757-899X/516/1/012009
DO - 10.1088/1757-899X/516/1/012009
M3 - Conference article
VL - 516
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
SN - 1757-8981
IS - 1
M1 - 012009
ER -