Aluminium pre-patterning for highly ordered nanoporous anodized alumina

V. Stasi, G. Cattaneo, S. Franz, M. Bestetti, M. C. Ubaldi, D. Piccinin, S. M. Pietralunga

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

A pre-patterning method of aluminium surface, in order to obtain highly ordered nanoporous anodized alumina on large areas is presented. Aluminium single crystals have been used as a substrate and a 2D hexagonally closed-packed lattice of shallow pits, with diameter of about 200 nm and period of 350 nm, has been successfully achieved by direct writing laser lithography (DWL) and wet etching. Finally, anodic oxidation of the single crystal at high cell voltage in phosphoric solution results in oxide growth with pore ordering superimposed by the pre-patterning procedure.

Original languageEnglish
Pages (from-to)136-139
Number of pages4
JournalPhotonics and Nanostructures - Fundamentals and Applications
Volume5
Issue number2-3
DOIs
Publication statusPublished - Oct 2007
Externally publishedYes

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Keywords

  • 2D lattice
  • Aluminium anodization
  • Aluminium pre-patterning
  • Direct writing laser lithography
  • Nanoporous anodic alumina

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science (miscellaneous)

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