Aluminium pre-patterning for highly ordered nanoporous anodized alumina

V. Stasi, G. Cattaneo, S. Franz, M. Bestetti, M. C. Ubaldi, D. Piccinin, S. M. Pietralunga

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

A pre-patterning method of aluminium surface, in order to obtain highly ordered nanoporous anodized alumina on large areas is presented. Aluminium single crystals have been used as a substrate and a 2D hexagonally closed-packed lattice of shallow pits, with diameter of about 200 nm and period of 350 nm, has been successfully achieved by direct writing laser lithography (DWL) and wet etching. Finally, anodic oxidation of the single crystal at high cell voltage in phosphoric solution results in oxide growth with pore ordering superimposed by the pre-patterning procedure.

Original languageEnglish
Pages (from-to)136-139
Number of pages4
JournalPhotonics and Nanostructures - Fundamentals and Applications
Volume5
Issue number2-3
DOIs
Publication statusPublished - Oct 2007
Externally publishedYes

Fingerprint

Aluminum Oxide
Aluminum
Alumina
aluminum oxides
Single crystals
aluminum
Wet etching
single crystals
Anodic oxidation
Oxides
Lithography
lithography
etching
porosity
oxidation
oxides
Lasers
Electric potential
electric potential
Substrates

Keywords

  • 2D lattice
  • Aluminium anodization
  • Aluminium pre-patterning
  • Direct writing laser lithography
  • Nanoporous anodic alumina

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science (miscellaneous)

Cite this

Aluminium pre-patterning for highly ordered nanoporous anodized alumina. / Stasi, V.; Cattaneo, G.; Franz, S.; Bestetti, M.; Ubaldi, M. C.; Piccinin, D.; Pietralunga, S. M.

In: Photonics and Nanostructures - Fundamentals and Applications, Vol. 5, No. 2-3, 10.2007, p. 136-139.

Research output: Contribution to journalArticle

Stasi, V. ; Cattaneo, G. ; Franz, S. ; Bestetti, M. ; Ubaldi, M. C. ; Piccinin, D. ; Pietralunga, S. M. / Aluminium pre-patterning for highly ordered nanoporous anodized alumina. In: Photonics and Nanostructures - Fundamentals and Applications. 2007 ; Vol. 5, No. 2-3. pp. 136-139.
@article{d44e916f96024aaa80560ddd1592ea01,
title = "Aluminium pre-patterning for highly ordered nanoporous anodized alumina",
abstract = "A pre-patterning method of aluminium surface, in order to obtain highly ordered nanoporous anodized alumina on large areas is presented. Aluminium single crystals have been used as a substrate and a 2D hexagonally closed-packed lattice of shallow pits, with diameter of about 200 nm and period of 350 nm, has been successfully achieved by direct writing laser lithography (DWL) and wet etching. Finally, anodic oxidation of the single crystal at high cell voltage in phosphoric solution results in oxide growth with pore ordering superimposed by the pre-patterning procedure.",
keywords = "2D lattice, Aluminium anodization, Aluminium pre-patterning, Direct writing laser lithography, Nanoporous anodic alumina",
author = "V. Stasi and G. Cattaneo and S. Franz and M. Bestetti and Ubaldi, {M. C.} and D. Piccinin and Pietralunga, {S. M.}",
year = "2007",
month = "10",
doi = "10.1016/j.photonics.2007.07.009",
language = "English",
volume = "5",
pages = "136--139",
journal = "Photonics and Nanostructures - Fundamentals and Applications",
issn = "1569-4410",
publisher = "Elsevier",
number = "2-3",

}

TY - JOUR

T1 - Aluminium pre-patterning for highly ordered nanoporous anodized alumina

AU - Stasi, V.

AU - Cattaneo, G.

AU - Franz, S.

AU - Bestetti, M.

AU - Ubaldi, M. C.

AU - Piccinin, D.

AU - Pietralunga, S. M.

PY - 2007/10

Y1 - 2007/10

N2 - A pre-patterning method of aluminium surface, in order to obtain highly ordered nanoporous anodized alumina on large areas is presented. Aluminium single crystals have been used as a substrate and a 2D hexagonally closed-packed lattice of shallow pits, with diameter of about 200 nm and period of 350 nm, has been successfully achieved by direct writing laser lithography (DWL) and wet etching. Finally, anodic oxidation of the single crystal at high cell voltage in phosphoric solution results in oxide growth with pore ordering superimposed by the pre-patterning procedure.

AB - A pre-patterning method of aluminium surface, in order to obtain highly ordered nanoporous anodized alumina on large areas is presented. Aluminium single crystals have been used as a substrate and a 2D hexagonally closed-packed lattice of shallow pits, with diameter of about 200 nm and period of 350 nm, has been successfully achieved by direct writing laser lithography (DWL) and wet etching. Finally, anodic oxidation of the single crystal at high cell voltage in phosphoric solution results in oxide growth with pore ordering superimposed by the pre-patterning procedure.

KW - 2D lattice

KW - Aluminium anodization

KW - Aluminium pre-patterning

KW - Direct writing laser lithography

KW - Nanoporous anodic alumina

UR - http://www.scopus.com/inward/record.url?scp=34748907467&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34748907467&partnerID=8YFLogxK

U2 - 10.1016/j.photonics.2007.07.009

DO - 10.1016/j.photonics.2007.07.009

M3 - Article

AN - SCOPUS:34748907467

VL - 5

SP - 136

EP - 139

JO - Photonics and Nanostructures - Fundamentals and Applications

JF - Photonics and Nanostructures - Fundamentals and Applications

SN - 1569-4410

IS - 2-3

ER -