AGC-Less Operation of High-Stability Lissajous Frequency-Modulated Mems Gyroscopes

Elia Bordiga, Marco Bestetti, Giacomo Langfelder

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper presents the first frequency-modulated gyroscope (FMG) operated under Lissajous excitation without motion control along the two axes. This operation method is compared to operation under velocity control and under displacement control to show that no significant differences in performance are achieved for the tested axisymmetric structure. At the same time, this operation method can boost the performance in terms of low-power consumption and low-noise by exploiting single-transistor-based oscillators in the system. A 1.6 Hz/Hz ratiometric scale-factor, a sub-0.3% linearity error, a scale-factor stability within 100 ppm/K and a noise of 6.3 mdps/√Hz (the smallest ever reported on FMGs operated in Lissajous mode) are demonstrated.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages594-597
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - Jun 2019
Externally publishedYes
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period23.6.1927.6.19

Keywords

  • automatic gain control
  • frequency modulation
  • MEMS gyroscopes

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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  • Cite this

    Bordiga, E., Bestetti, M., & Langfelder, G. (2019). AGC-Less Operation of High-Stability Lissajous Frequency-Modulated Mems Gyroscopes. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 594-597). [8808514] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808514