Adhesion properties of a silicon-containing calcium phosphate coating deposited by RF magnetron sputtering on a heated substrate

Research output: Contribution to journalArticle

10 Citations (Scopus)


Silicon-containing hydroxyapatite coatings 400-700 nm in thickness are prepared by means of radio-frequency (RF) magnetron sputtering on a heated (to 200°C) titanium substrate chemically etched and treated with a pulsed electron beam. The morphology and phase composition of the coating are studied. The morphology and roughness of the composite "calcium-phosphate coating-titanium substrate" differ depending on the treatment procedure of the substrate before deposition. The scratch test method is used to assess the adhesion strength of the coatings formed at different values of bias potential applied to the substrate. It is observed that the adhesion strength of the coating changes with decreasing crystallite size.

Original languageEnglish
Pages (from-to)944-951
Number of pages8
JournalJournal of Surface Investigation
Issue number5
Publication statusPublished - 1 Sep 2013


ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this