A Universal Ion Source

G. V. Potemkin, V. F. Kalmykov

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.

    Original languageEnglish
    Pages (from-to)704-708
    Number of pages5
    JournalInstruments and Experimental Techniques
    Volume44
    Issue number5
    DOIs
    Publication statusPublished - 2001

    Fingerprint

    Ion sources
    ion sources
    Ion beams
    chambers
    ion beams
    gases
    crossed fields
    Plasmas
    metal vapors
    Plasma sources
    Glow discharges
    glow discharges
    metals
    Sputtering
    sputtering
    Vapors
    Electrodes
    electrodes
    rings
    Metals

    ASJC Scopus subject areas

    • Engineering (miscellaneous)
    • Instrumentation

    Cite this

    A Universal Ion Source. / Potemkin, G. V.; Kalmykov, V. F.

    In: Instruments and Experimental Techniques, Vol. 44, No. 5, 2001, p. 704-708.

    Research output: Contribution to journalArticle

    Potemkin, GV & Kalmykov, VF 2001, 'A Universal Ion Source', Instruments and Experimental Techniques, vol. 44, no. 5, pp. 704-708. https://doi.org/10.1023/A:1012378414402
    Potemkin, G. V. ; Kalmykov, V. F. / A Universal Ion Source. In: Instruments and Experimental Techniques. 2001 ; Vol. 44, No. 5. pp. 704-708.
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