Abstract
A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.
| Original language | English |
|---|---|
| Pages (from-to) | 704-708 |
| Number of pages | 5 |
| Journal | Instruments and Experimental Techniques |
| Volume | 44 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2001 |
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ASJC Scopus subject areas
- Engineering (miscellaneous)
- Instrumentation
Cite this
A Universal Ion Source. / Potemkin, G. V.; Kalmykov, V. F.
In: Instruments and Experimental Techniques, Vol. 44, No. 5, 2001, p. 704-708.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A Universal Ion Source
AU - Potemkin, G. V.
AU - Kalmykov, V. F.
PY - 2001
Y1 - 2001
N2 - A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.
AB - A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.
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U2 - 10.1023/A:1012378414402
DO - 10.1023/A:1012378414402
M3 - Article
AN - SCOPUS:0035779952
VL - 44
SP - 704
EP - 708
JO - Instruments and Experimental Techniques
JF - Instruments and Experimental Techniques
SN - 0020-4412
IS - 5
ER -