A Universal Ion Source

Abstract

A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.

Original language	English
Pages (from-to)	704-708
Number of pages	5
Journal	Instruments and Experimental Techniques
Volume	44
Issue number	5
DOIs	https://doi.org/10.1023/A:1012378414402
Publication status	Published - 2001

ASJC Scopus subject areas

Engineering (miscellaneous)
Instrumentation

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@article{1fa7303f455742aea7d01162e22bca53,

title = "A Universal Ion Source",

abstract = "A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.",

author = "Potemkin, {G. V.} and Kalmykov, {V. F.}",

year = "2001",

doi = "10.1023/A:1012378414402",

language = "English",

volume = "44",

pages = "704--708",

journal = "Instruments and Experimental Techniques",

issn = "0020-4412",

publisher = "Maik Nauka-Interperiodica Publishing",

number = "5",

}

TY - JOUR

T1 - A Universal Ion Source

AU - Potemkin, G. V.

AU - Kalmykov, V. F.

PY - 2001

Y1 - 2001

N2 - A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.

AB - A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.

UR - http://www.scopus.com/inward/record.url?scp=0348203756&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0348203756&partnerID=8YFLogxK

U2 - 10.1023/A:1012378414402

DO - 10.1023/A:1012378414402

M3 - Article

AN - SCOPUS:0035779952

VL - 44

SP - 704

EP - 708

JO - Instruments and Experimental Techniques

JF - Instruments and Experimental Techniques

SN - 0020-4412

IS - 5

ER -