Abstract
A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.
Original language | English |
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Pages (from-to) | 704-708 |
Number of pages | 5 |
Journal | Instruments and Experimental Techniques |
Volume | 44 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2001 |
ASJC Scopus subject areas
- Engineering (miscellaneous)
- Instrumentation