A Universal Ion Source

Abstract

A model of an ion source based on a glow discharge in crossed fields for obtaining a drop-free stationary beam with a controlled Ti-to-N component ratio is described. A two-stage process of producing a gas-metal plasma takes place in a two-chamber device. The external ring-shaped chamber is the plasma source of a radially converging gas ion beam entering the internal chamber, in which metal vapors are produced by means of controllable sputtering of an isolated target electrode, and a gas-metal plasma is obtained for extraction of a mixed ion beam. A ion beam with an energy of 40 keV and a current of 6 mA at a Ti-to-N ratio of -0.8 is extrt-acted. The model is designed for studying processes related to the obtainment of nonseparated beams of mixed composition and their use in technology.

Original language	English
Pages (from-to)	704-708
Number of pages	5
Journal	Instruments and Experimental Techniques
Volume	44
Issue number	5
DOIs	https://doi.org/10.1023/A:1012378414402
Publication status	Published - 2001

ASJC Scopus subject areas

Engineering (miscellaneous)
Instrumentation

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Potemkin, G. V., & Kalmykov, V. F. (2001). A Universal Ion Source. Instruments and Experimental Techniques, 44(5), 704-708. https://doi.org/10.1023/A:1012378414402

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