Abstract
A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ∼100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.
| Original language | English |
|---|---|
| Pages (from-to) | 234-236 |
| Number of pages | 3 |
| Journal | Instruments and Experimental Techniques |
| Volume | 41 |
| Issue number | 2 |
| Publication status | Published - 1998 |
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ASJC Scopus subject areas
- Engineering (miscellaneous)
- Instrumentation
Cite this
A plasma-cathode electron gun for beam generation in the forevacuum pressure range. / Mytnikov, A. V.; Oks, E. M.; Chagin, A. A.
In: Instruments and Experimental Techniques, Vol. 41, No. 2, 1998, p. 234-236.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A plasma-cathode electron gun for beam generation in the forevacuum pressure range
AU - Mytnikov, A. V.
AU - Oks, E. M.
AU - Chagin, A. A.
PY - 1998
Y1 - 1998
N2 - A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ∼100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.
AB - A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ∼100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.
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UR - http://www.scopus.com/inward/citedby.url?scp=0042424392&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0042424392
VL - 41
SP - 234
EP - 236
JO - Instruments and Experimental Techniques
JF - Instruments and Experimental Techniques
SN - 0020-4412
IS - 2
ER -