A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ∼100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.
|Number of pages||3|
|Journal||Instruments and Experimental Techniques|
|Publication status||Published - 1998|
ASJC Scopus subject areas
- Engineering (miscellaneous)