A plasma-cathode electron gun for beam generation in the forevacuum pressure range

Abstract

A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ∼100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.

Original language	English
Pages (from-to)	234-236
Number of pages	3
Journal	Instruments and Experimental Techniques
Volume	41
Issue number	2
Publication status	Published - 1998

ASJC Scopus subject areas

Engineering (miscellaneous)
Instrumentation

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title = "A plasma-cathode electron gun for beam generation in the forevacuum pressure range",

abstract = "A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ∼100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.",

author = "Mytnikov, {A. V.} and Oks, {E. M.} and Chagin, {A. A.}",

year = "1998",

language = "English",

volume = "41",

pages = "234--236",

journal = "Instruments and Experimental Techniques",

issn = "0020-4412",

publisher = "Maik Nauka-Interperiodica Publishing",

number = "2",

}

TY - JOUR

T1 - A plasma-cathode electron gun for beam generation in the forevacuum pressure range

AU - Mytnikov, A. V.

AU - Oks, E. M.

AU - Chagin, A. A.

PY - 1998

Y1 - 1998

N2 - A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ∼100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.

AB - A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the forevacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ∼100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.

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AN - SCOPUS:0042424392

VL - 41

SP - 234

EP - 236

JO - Instruments and Experimental Techniques

JF - Instruments and Experimental Techniques

SN - 0020-4412

IS - 2

ER -