A plasma-cathode electron gun for beam generation in the fore-vacuum pressure range

Abstract

A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the fore-vacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ≈100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.

Original language	English
Pages (from-to)	95-98
Number of pages	4
Journal	Pribory i Tekhnika Eksperimenta
Volume	41
Issue number	2
Publication status	Published - Mar 1998

ASJC Scopus subject areas

Instrumentation

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title = "A plasma-cathode electron gun for beam generation in the fore-vacuum pressure range",

abstract = "A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the fore-vacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ≈100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.",

author = "Mytnikov, {A. V.} and Oks, {E. M.} and Chagin, {A. A.}",

year = "1998",

month = mar,

language = "English",

volume = "41",

pages = "95--98",

journal = "Pribory i Tekhnika Eksperimenta",

issn = "0032-8162",

publisher = "Izdatel'stvo Nauka",

number = "2",

}

TY - JOUR

T1 - A plasma-cathode electron gun for beam generation in the fore-vacuum pressure range

AU - Mytnikov, A. V.

AU - Oks, E. M.

AU - Chagin, A. A.

PY - 1998/3

Y1 - 1998/3

N2 - A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the fore-vacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ≈100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.

AB - A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the fore-vacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ≈100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.

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M3 - Article

AN - SCOPUS:0032020816

VL - 41

SP - 95

EP - 98

JO - Pribory i Tekhnika Eksperimenta

JF - Pribory i Tekhnika Eksperimenta

SN - 0032-8162

IS - 2

ER -