A plasma-cathode electron gun for beam generation in the fore-vacuum pressure range

A. V. Mytnikov, E. M. Oks, A. A. Chagin

Research output: Contribution to journalArticlepeer-review

Abstract

A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the fore-vacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ≈100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.

Original languageEnglish
Pages (from-to)95-98
Number of pages4
JournalPribory i Tekhnika Eksperimenta
Volume41
Issue number2
Publication statusPublished - Mar 1998

ASJC Scopus subject areas

  • Instrumentation

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