Abstract
A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the fore-vacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ≈100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.
| Original language | English |
|---|---|
| Pages (from-to) | 95-98 |
| Number of pages | 4 |
| Journal | Pribory i Tekhnika Eksperimenta |
| Volume | 41 |
| Issue number | 2 |
| Publication status | Published - Mar 1998 |
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ASJC Scopus subject areas
- Instrumentation
Cite this
A plasma-cathode electron gun for beam generation in the fore-vacuum pressure range. / Mytnikov, A. V.; Oks, E. M.; Chagin, A. A.
In: Pribory i Tekhnika Eksperimenta, Vol. 41, No. 2, 03.1998, p. 95-98.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A plasma-cathode electron gun for beam generation in the fore-vacuum pressure range
AU - Mytnikov, A. V.
AU - Oks, E. M.
AU - Chagin, A. A.
PY - 1998/3
Y1 - 1998/3
N2 - A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the fore-vacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ≈100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.
AB - A plasma electron source based on a steady-state hollow-cathode glow discharge for generation of electron beams in the fore-vacuum pressure range is described. An electron beam is obtained at comparatively high pressures due to the formation of different conditions for gas ionization in the discharge and accelerating gaps. The source beam current value reaches 400 mA for a residual gas pressure of ≈100 mTorr and an accelerating voltage up to 8 kV. This electron gun can be used in plasmochemical apparatuses and in techniques for modifying the surface properties of materials.
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UR - http://www.scopus.com/inward/citedby.url?scp=0032020816&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0032020816
VL - 41
SP - 95
EP - 98
JO - Pribory i Tekhnika Eksperimenta
JF - Pribory i Tekhnika Eksperimenta
SN - 0032-8162
IS - 2
ER -