A Novel System of Primary Oscillations for Micromechanical Gyroscope

P. Baranov, T. Nesterenko, B. B. Duc, L. V. Hao

Research output: Contribution to journalConference articlepeer-review

Abstract

The paper proposes a novel system of primary oscillations produced by the microelectromechanical (MEMS) gyroscope. This system is based on a synchronous detection of the current passing through the power capacitances of MEMS gyroscope. This detection method enables the excitation and stabilization of primary oscillations during two measuring cycles. The proposed system of primary oscillations also enhances the operation speed and the accuracy of frequency control, and reduces the ambient temperature effect on the stability of the scaling factor of the MEMS gyroscope.

Original languageEnglish
Article number012004
JournalIOP Conference Series: Materials Science and Engineering
Volume841
Issue number1
DOIs
Publication statusPublished - 16 Jun 2020
Event2019 4th International Conference on Mechatronics and Electrical Systems, ICMES 2019 - Prague, Czech Republic
Duration: 11 Oct 201913 Oct 2019

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

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