The paper proposes a novel system of primary oscillations produced by the microelectromechanical (MEMS) gyroscope. This system is based on a synchronous detection of the current passing through the power capacitances of MEMS gyroscope. This detection method enables the excitation and stabilization of primary oscillations during two measuring cycles. The proposed system of primary oscillations also enhances the operation speed and the accuracy of frequency control, and reduces the ambient temperature effect on the stability of the scaling factor of the MEMS gyroscope.
|Journal||IOP Conference Series: Materials Science and Engineering|
|Publication status||Published - 16 Jun 2020|
|Event||2019 4th International Conference on Mechatronics and Electrical Systems, ICMES 2019 - Prague, Czech Republic|
Duration: 11 Oct 2019 → 13 Oct 2019
ASJC Scopus subject areas
- Materials Science(all)