A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames

Pavel Baranov, Tamara Nesterenko, Evgenii Barbin, Aleksej Koleda, Shuji Tanaka, Takashiro Tsukamoto, Ivan Kulinich, Dmitry Zykov, Alexander Shelupanov

Research output: Contribution to journalArticle

Abstract

Purpose: Technological capabilities of manufacturing microelectromechanical system (MEMS) gyroscopes are still insufficient if compared to manufacturing high-efficient gyroscopes and accelerometers. This creates weaknesses in their mechanical structure and restrictions in the measurement accuracy, stability and reliability of MEMS gyroscopes and accelerometers. This paper aims to develop a new architectural solutions for optimization of MEMS gyroscopes and accelerometers and propose a multi-axis MEMS inertial module combining the functions of gyroscope and accelerometer. Design/methodology/approach: The finite element modeling (FEM) and the modal analysis in FEM are used for sensing, drive and control electrode capacitances of the multi-axis MEMS inertial module with the proposed new architecture. The description is given to its step-by-step process of manufacturing. Algorithms are developed to detect its angular rates and linear acceleration along three Cartesian axes. Findings: Experimental results are obtained for eigenfrequencies and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent. The maximum difference between the calculated and simulated eigenfrequencies in the drive channel of 11 SES prototypes is not over 3 per cent. The same difference is detected for eigenfrequencies in the first sensing channel of 17 SES prototypes. Originality/value: This study shows a way to design and optimize the structure and theoretical background for the development of the MEMS inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers.

Original languageEnglish
Pages (from-to)670-681
Number of pages12
JournalSensor Review
Volume39
Issue number5
DOIs
Publication statusPublished - 16 Sep 2019

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Gyroscopes
Accelerometers
MEMS
Silicon
Capacitance
Sensors
Electrodes
Modal analysis

Keywords

  • Accelerometers
  • Antiphase vibrations
  • Decoupling frame
  • Electromechanical sensors
  • MEMS
  • Turning fork gyroscopes

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames. / Baranov, Pavel; Nesterenko, Tamara; Barbin, Evgenii; Koleda, Aleksej; Tanaka, Shuji; Tsukamoto, Takashiro; Kulinich, Ivan; Zykov, Dmitry; Shelupanov, Alexander.

In: Sensor Review, Vol. 39, No. 5, 16.09.2019, p. 670-681.

Research output: Contribution to journalArticle

Baranov, Pavel ; Nesterenko, Tamara ; Barbin, Evgenii ; Koleda, Aleksej ; Tanaka, Shuji ; Tsukamoto, Takashiro ; Kulinich, Ivan ; Zykov, Dmitry ; Shelupanov, Alexander. / A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames. In: Sensor Review. 2019 ; Vol. 39, No. 5. pp. 670-681.
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AB - Purpose: Technological capabilities of manufacturing microelectromechanical system (MEMS) gyroscopes are still insufficient if compared to manufacturing high-efficient gyroscopes and accelerometers. This creates weaknesses in their mechanical structure and restrictions in the measurement accuracy, stability and reliability of MEMS gyroscopes and accelerometers. This paper aims to develop a new architectural solutions for optimization of MEMS gyroscopes and accelerometers and propose a multi-axis MEMS inertial module combining the functions of gyroscope and accelerometer. Design/methodology/approach: The finite element modeling (FEM) and the modal analysis in FEM are used for sensing, drive and control electrode capacitances of the multi-axis MEMS inertial module with the proposed new architecture. The description is given to its step-by-step process of manufacturing. Algorithms are developed to detect its angular rates and linear acceleration along three Cartesian axes. Findings: Experimental results are obtained for eigenfrequencies and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent. The maximum difference between the calculated and simulated eigenfrequencies in the drive channel of 11 SES prototypes is not over 3 per cent. The same difference is detected for eigenfrequencies in the first sensing channel of 17 SES prototypes. Originality/value: This study shows a way to design and optimize the structure and theoretical background for the development of the MEMS inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers.

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