A mathematical model of multilayer coating deposition from plasma

Research output: Contribution to journalArticlepeer-review

Abstract

In the present paper, a coupled model of formation of a multilayer coating on the surface of a cylindrical part by deposition from plasma is suggested. The phenomena of thermal diffusion, diffusion heat conduction, mass transfer under the effect of the stress gradient, and of the formation of chemical compounds are taken into account. The rate of coating growth is taken to be a specified function of the velocities and concentration of particles near the surface of the growing coating. The problem is solved numerically. It is shown that during the process of growth the diffusion cross flows, diffusion heat conduction, and thermal diffusion lead to a decrease in the width of the mesoscale transition region between the substrate and the coating. This effect becomes most obvious when the substrate has low thermal conductivity. The account for stresses that develop in the coating–substrate system during the deposition process results in the change of the effective coefficients of transfer and exerts a noticeable effect on the distribution of chemical elements and their compounds in the coating.

Original languageEnglish
Pages (from-to)335-347
Number of pages13
JournalInternational Journal of Nanomechanics Science and Technology
Volume7
Issue number4
DOIs
Publication statusPublished - 2016

Keywords

  • Chemical transformations
  • Coating deposition
  • Coupled model
  • Cross effects

ASJC Scopus subject areas

  • Mechanics of Materials

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