A high-current ion accelerator for short-pulse ion implantation

Abstract

A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm², an energy of 30-150 kV/n (n is the ion charge), a beam cross-section area of 180 cm², and a pulse repetition frequency of up to 10 Hz, is described. The accelerator comprises a high-voltage (300 kV) pulse transformer, a nanosecond generator using low-ohmic cables capable of producing two voltage pulses of arbitrary polarity, and a magnetically insulated diode. The first nanosecond voltage pulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the accelerator is illustrated by data on the production of hydrogen, carbon, and aluminum ion beams.

Original language	English
Pages (from-to)	727-731
Number of pages	5
Journal	Instruments and Experimental Techniques
Volume	40
Issue number	5
Publication status	Published - Sep 1997

ASJC Scopus subject areas

Engineering (miscellaneous)
Instrumentation

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@article{e6f56f17ef6541a0bb70c3a0ae27e2c8,

title = "A high-current ion accelerator for short-pulse ion implantation",

abstract = "A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm2, an energy of 30-150 kV/n (n is the ion charge), a beam cross-section area of 180 cm2, and a pulse repetition frequency of up to 10 Hz, is described. The accelerator comprises a high-voltage (300 kV) pulse transformer, a nanosecond generator using low-ohmic cables capable of producing two voltage pulses of arbitrary polarity, and a magnetically insulated diode. The first nanosecond voltage pulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the accelerator is illustrated by data on the production of hydrogen, carbon, and aluminum ion beams.",

author = "Remnev, {G. E.} and Opekunov, {M. S.} and Vasil'ev, {V. V.} and Lukonin, {E. I.} and Matvienko, {V. M.} and Furman, {E. G.}",

year = "1997",

month = sep,

language = "English",

volume = "40",

pages = "727--731",

journal = "Instruments and Experimental Techniques",

issn = "0020-4412",

publisher = "Maik Nauka-Interperiodica Publishing",

number = "5",

}

TY - JOUR

T1 - A high-current ion accelerator for short-pulse ion implantation

AU - Remnev, G. E.

AU - Opekunov, M. S.

AU - Vasil'ev, V. V.

AU - Lukonin, E. I.

AU - Matvienko, V. M.

AU - Furman, E. G.

PY - 1997/9

Y1 - 1997/9

N2 - A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm2, an energy of 30-150 kV/n (n is the ion charge), a beam cross-section area of 180 cm2, and a pulse repetition frequency of up to 10 Hz, is described. The accelerator comprises a high-voltage (300 kV) pulse transformer, a nanosecond generator using low-ohmic cables capable of producing two voltage pulses of arbitrary polarity, and a magnetically insulated diode. The first nanosecond voltage pulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the accelerator is illustrated by data on the production of hydrogen, carbon, and aluminum ion beams.

AB - A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm2, an energy of 30-150 kV/n (n is the ion charge), a beam cross-section area of 180 cm2, and a pulse repetition frequency of up to 10 Hz, is described. The accelerator comprises a high-voltage (300 kV) pulse transformer, a nanosecond generator using low-ohmic cables capable of producing two voltage pulses of arbitrary polarity, and a magnetically insulated diode. The first nanosecond voltage pulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the accelerator is illustrated by data on the production of hydrogen, carbon, and aluminum ion beams.

UR - http://www.scopus.com/inward/record.url?scp=0039540033&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0039540033&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0039540033

VL - 40

SP - 727

EP - 731

JO - Instruments and Experimental Techniques

JF - Instruments and Experimental Techniques

SN - 0020-4412

IS - 5

ER -