Abstract
A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm2, an energy of 30-150 kV/n (n is the ion charge), a beam cross-section area of 180 cm2, and a pulse repetition frequency of up to 10 Hz, is described. The accelerator comprises a high-voltage (300 kV) pulse transformer, a nanosecond generator using low-ohmic cables capable of producing two voltage pulses of arbitrary polarity, and a magnetically insulated diode. The first nanosecond voltage pulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the accelerator is illustrated by data on the production of hydrogen, carbon, and aluminum ion beams.
| Original language | English |
|---|---|
| Pages (from-to) | 727-731 |
| Number of pages | 5 |
| Journal | Instruments and Experimental Techniques |
| Volume | 40 |
| Issue number | 5 |
| Publication status | Published - Sep 1997 |
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ASJC Scopus subject areas
- Engineering (miscellaneous)
- Instrumentation
Cite this
A high-current ion accelerator for short-pulse ion implantation. / Remnev, G. E.; Opekunov, M. S.; Vasil'ev, V. V.; Lukonin, E. I.; Matvienko, V. M.; Furman, E. G.
In: Instruments and Experimental Techniques, Vol. 40, No. 5, 09.1997, p. 727-731.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A high-current ion accelerator for short-pulse ion implantation
AU - Remnev, G. E.
AU - Opekunov, M. S.
AU - Vasil'ev, V. V.
AU - Lukonin, E. I.
AU - Matvienko, V. M.
AU - Furman, E. G.
PY - 1997/9
Y1 - 1997/9
N2 - A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm2, an energy of 30-150 kV/n (n is the ion charge), a beam cross-section area of 180 cm2, and a pulse repetition frequency of up to 10 Hz, is described. The accelerator comprises a high-voltage (300 kV) pulse transformer, a nanosecond generator using low-ohmic cables capable of producing two voltage pulses of arbitrary polarity, and a magnetically insulated diode. The first nanosecond voltage pulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the accelerator is illustrated by data on the production of hydrogen, carbon, and aluminum ion beams.
AB - A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm2, an energy of 30-150 kV/n (n is the ion charge), a beam cross-section area of 180 cm2, and a pulse repetition frequency of up to 10 Hz, is described. The accelerator comprises a high-voltage (300 kV) pulse transformer, a nanosecond generator using low-ohmic cables capable of producing two voltage pulses of arbitrary polarity, and a magnetically insulated diode. The first nanosecond voltage pulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the accelerator is illustrated by data on the production of hydrogen, carbon, and aluminum ion beams.
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UR - http://www.scopus.com/inward/citedby.url?scp=0039540033&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0039540033
VL - 40
SP - 727
EP - 731
JO - Instruments and Experimental Techniques
JF - Instruments and Experimental Techniques
SN - 0020-4412
IS - 5
ER -