A high-current ion accelerator for short-pulse ion implantation

G. E. Remnev, M. S. Opekunov, V. V. Vasil'ev, E. I. Lukonin, V. M. Matvienko, E. G. Furman

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A high-current pulsed accelerator, producing ion beams with a current density of 4-20 A/cm2, an energy of 30-150 kV/n (n is the ion charge), a beam cross-section area of 180 cm2, and a pulse repetition frequency of up to 10 Hz, is described. The accelerator comprises a high-voltage (300 kV) pulse transformer, a nanosecond generator using low-ohmic cables capable of producing two voltage pulses of arbitrary polarity, and a magnetically insulated diode. The first nanosecond voltage pulse forms an explosion-emission plasma at the anode surface, and the following nanosecond pulse accelerates the ions. Performance of the accelerator is illustrated by data on the production of hydrogen, carbon, and aluminum ion beams.

Original languageEnglish
Pages (from-to)727-731
Number of pages5
JournalInstruments and Experimental Techniques
Volume40
Issue number5
Publication statusPublished - Sep 1997

Fingerprint

ion accelerators
Ion implantation
Particle accelerators
high current
ion implantation
Ion beams
Ions
Electric potential
pulses
Pulse transformers
accelerators
Explosions
ion beams
Anodes
Cables
Diodes
Current density
ion charge
Aluminum
Plasmas

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Instrumentation

Cite this

Remnev, G. E., Opekunov, M. S., Vasil'ev, V. V., Lukonin, E. I., Matvienko, V. M., & Furman, E. G. (1997). A high-current ion accelerator for short-pulse ion implantation. Instruments and Experimental Techniques, 40(5), 727-731.

A high-current ion accelerator for short-pulse ion implantation. / Remnev, G. E.; Opekunov, M. S.; Vasil'ev, V. V.; Lukonin, E. I.; Matvienko, V. M.; Furman, E. G.

In: Instruments and Experimental Techniques, Vol. 40, No. 5, 09.1997, p. 727-731.

Research output: Contribution to journalArticle

Remnev, GE, Opekunov, MS, Vasil'ev, VV, Lukonin, EI, Matvienko, VM & Furman, EG 1997, 'A high-current ion accelerator for short-pulse ion implantation', Instruments and Experimental Techniques, vol. 40, no. 5, pp. 727-731.
Remnev GE, Opekunov MS, Vasil'ev VV, Lukonin EI, Matvienko VM, Furman EG. A high-current ion accelerator for short-pulse ion implantation. Instruments and Experimental Techniques. 1997 Sep;40(5):727-731.
Remnev, G. E. ; Opekunov, M. S. ; Vasil'ev, V. V. ; Lukonin, E. I. ; Matvienko, V. M. ; Furman, E. G. / A high-current ion accelerator for short-pulse ion implantation. In: Instruments and Experimental Techniques. 1997 ; Vol. 40, No. 5. pp. 727-731.
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