A Detailed Investigation of Radicals and Ions in ECR Methane/Argon Microwave Discharge

Petr Pokorný, Martin Mišina, Michal Novotný, Přemysl Fitl, Jan Vlček, Jindřich Musil, Eva Marešová, Jiří Bulíř, Jan Lančok

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

In this work, we focus on study of the formation and behavior of molecules, radicals, and ions in ECR discharge in a mixture of argon and methane. Discharge properties are studied at various conditions; total gas flow (0–50 sccm), absorbed microwave power (0–900 W) and the partial pressure of methane (0–1.2 Pa). Neutral mass spectrometry does not reveal the presence of radical CH5 commonly described in literature. Spectra show the presence of atomic hydrogen H and especially H2 molecules. The number of CH4 + and CH3 + species shows that the amount of CH4 + in areas power up to 350 W is high, but with further increase of the power their amount decreases. With the increasing power the CH3 + ions are more intensively generated. The obtained data helps optimize process conditions for the fabrication of diamond and DLC thin films.

Original languageEnglish
Pages (from-to)970-980
Number of pages11
JournalPlasma Processes and Polymers
Volume13
Issue number10
DOIs
Publication statusPublished - 1 Oct 2016

Keywords

  • diamond-like carbon
  • electron cyclotron resonance
  • mass spectrometry
  • methane
  • radicals

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Polymers and Plastics

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