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Research Output 2012 2019

  • 18 Citations
  • 3 h-Index
  • 11 Article
  • 3 Conference contribution
  • 1 Conference article
Conference article

Deposition of the low resistive ITO-films by means of reactive magnetron sputtering of the In/Sn target on the cold substrate

Zhidik, Y. S., Troyan, P. E., Baturina, E. V., Korzhenko, D. V. & Yurjev, Y. N., 2 Aug 2016, In : IOP Conference Series: Materials Science and Engineering. 135, 1, 012055.

Research output: Contribution to journalConference article

Reactive sputtering
Magnetron sputtering
Sheet resistance
Semiconductor devices