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Research Output 2012 2019

  • 19 Citations
  • 3 h-Index
  • 11 Article
  • 3 Conference contribution
  • 1 Conference article
2019
Magnetron sputtering
magnetron sputtering
Sputtering
Liquids
liquids
2017

Analysis of work and efficiency increase of of the ILUR-03 installation magnetron system for tubular specimens outer surface modification

Kalin, B. A., Volkov, N. V., Valikov, R. A., Yashin, A. S., Krivobokov, V. P., Yanin, S. N. & Yurjev, Y. N., 4 May 2017, In : Journal of Physics: Conference Series. 830, 1, 012058.

Research output: Contribution to journalArticle

magnetrons
installing
ion beams
zirconium alloys
alloying

Increase the threshold voltage of high voltage GaN transistors by low temperature atomic hydrogen treatment

Erofeev, E. V., Fedin, I. V., Kutkov, I. V. & Yurjev, Y. N., 1 Feb 2017, In : Semiconductors. 51, 2, p. 245-248 4 p.

Research output: Contribution to journalArticle

Threshold voltage
threshold voltage
high voltages
Hydrogen
Transistors

Power switching transistors based on gallium nitride epitaxial heterostructures

Erofeev, E. V., Fedin, I. V. & Yurjev, Y. N., 1 May 2017, In : Russian Microelectronics. 46, 3, p. 205-210 6 p.

Research output: Contribution to journalArticle

Gallium nitride
gallium nitrides
Heterojunctions
Transistors
transistors
1 Citation (Scopus)

Study on the influence of the magnetron power supply on the properties of the Silicon Nitride films

Kiseleva, D. V., Yurjev, Y. N., Petrakov, Y. V., Sidelev, D. V., Korzhenko, D. V. & Erofeev, E. V., 10 Feb 2017, In : Journal of Physics: Conference Series. 789, 1, 012028.

Research output: Contribution to journalArticle

silicon nitrides
power supplies
spectrophotometry
magnetron sputtering
refractivity
2016
1 Citation (Scopus)

Antifriction coatings based on a-C for biomedicine applications

Yurjev, Y. N., Kiseleva, D. V., Zaitcev, D. A., Sidelev, D. V. & Korneva, O. S., 14 Jan 2016, In : Journal of Physics: Conference Series. 669, 1, 012066.

Research output: Contribution to journalArticle

friction
coatings
magnetic fields
magnetron sputtering
hardness

Deposition of the low resistive ITO-films by means of reactive magnetron sputtering of the In/Sn target on the cold substrate

Zhidik, Y. S., Troyan, P. E., Baturina, E. V., Korzhenko, D. V. & Yurjev, Y. N., 2 Aug 2016, In : IOP Conference Series: Materials Science and Engineering. 135, 1, 012055.

Research output: Contribution to journalConference article

Reactive sputtering
Magnetron sputtering
Substrates
Sheet resistance
Semiconductor devices

Finish ion beam treatment of the longrange cylindrical products outer surface in automatic mode

Kalin, B. A., Volkov, N. V., Valikov, R. A., Yashin, A. S., Krivobokov, V. P., Yanin, S. N., Asainov, O. K. & Yurev, Y. N., 18 May 2016, In : IOP Conference Series: Materials Science and Engineering. 130, 1, 012051.

Research output: Contribution to journalArticle

Ion beams
Zirconium alloys
Polishing
Oxide films
Cleaning

Low resistance Cu3Ge compounds formation by the low temperature treatment of Cu/Ge system in atomic hydrogen

Kazimirov, A. I., Erofeev, E. V., Fedin, I. V., Kagadei, V. A. & Yurjev, Y. N., 2 Aug 2016, In : IOP Conference Series: Materials Science and Engineering. 135, 1, 012016.

Research output: Contribution to journalArticle

Hydrogen
Temperature
Phase composition
Chemical reactions
Chemical activation
6 Citations (Scopus)

The oxygen-deficient TiO2 films deposited by a dual magnetron sputtering

Sidelev, D. V., Yurjev, Y. N., Krivobokov, V. P., Erofeev, E. V., Penkova, O. V. & Novikov, V. A., 1 Dec 2016, In : Vacuum. 134, p. 29-32 4 p.

Research output: Contribution to journalArticle

Magnetron sputtering
magnetron sputtering
magnetic field configurations
Oxygen
oxygen
2015
1 Citation (Scopus)

Modification of the cylindrical products outer surface influenced by radial beam of argon ions at automatic mode

Valikov, R. A., Yashin, A. S., Yakutkina, T. V., Kalin, B. A., Volkov, N. V., Krivobokov, V. P., Yanin, S. N., Asainov, O. K. & Yurev, Y. N., 5 Nov 2015, In : Journal of Physics: Conference Series. 652, 1, 012068.

Research output: Contribution to journalArticle

polishing
argon
products
cleaning
installing
2014
1 Citation (Scopus)

Effect of magnetic field configuration of dual magnetron on carbon based films properties

Yurjev, Y. N., Zaitcev, D. A., Sidelev, D. V. & Tupikova, O. S., 2014, Advanced Materials Research. Trans Tech Publications Ltd, Vol. 1040. p. 721-725 5 p. (Advanced Materials Research; vol. 1040).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Magnetic fields
Carbon
Carbon films
Auger electron spectroscopy
Deposition rates
3 Citations (Scopus)

The reactive deposition of TiOx thin films

Sidelev, D. V. & Yurjev, Y. N., 2014, Advanced Materials Research. Trans Tech Publications Ltd, Vol. 1040. p. 748-752 5 p. (Advanced Materials Research; vol. 1040).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hysteresis
Thin films
Ultrathin films
Ellipsometry
Spectrophotometry
2013
5 Citations (Scopus)
coatings
magnetron sputtering
magnetrons
anatase
rutile
2012
1 Citation (Scopus)

Deposition of diamond-like carbon films from the magnetron discharge plasma

Yuryev, Y., Yuryeva, A., Korzhenko, D. & Stepanova, O., 1 Dec 2012, Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012. 6357575

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diamond like carbon films
Plasmas
Magnetron sputtering
Laser ablation
Pulsed lasers