• 121 Citations
  • 6 h-Index
1977 …2018
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  • 8 Similar Profiles
magnetron sputtering Physics & Astronomy
Magnetron sputtering Engineering & Materials Science
erosion Physics & Astronomy
Erosion Engineering & Materials Science
Ion beams Engineering & Materials Science
ion beams Physics & Astronomy
Deposition rates Engineering & Materials Science
Coatings Engineering & Materials Science

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Research Output 1977 2018

  • 121 Citations
  • 6 h-Index
  • 42 Article
  • 2 Conference contribution
1 Citations

Deposition of Cr films by hot target magnetron sputtering on biased substrates

Sidelev, D. V., Bestetti, M., Bleykher, G. A., Krivobokov, V. P., Grudinin, V. A., Franz, S., Vicenzo, A. & Shanenkova, Y. L., 25 Sep 2018, In : Surface and Coatings Technology. 350, p. 560-568 9 p.

Research output: Contribution to journalArticle

Magnetron sputtering
Deposition rates
magnetron sputtering
Substrates
Sublimation
2 Citations

Hot target magnetron sputtering for ferromagnetic films deposition

Sidelev, D. V., Bleykher, G. A., Grudinin, V. A., Krivobokov, V. P., Bestetti, M., Syrtanov, M. S. & Erofeev, E. V., 25 Jan 2018, In : Surface and Coatings Technology. 334, p. 61-70 10 p.

Research output: Contribution to journalArticle

ferromagnetic films
Magnetron sputtering
Sputtering
magnetron sputtering
sputtering
Deposition rates
Magnetron sputtering
erosion
Sputtering
Erosion
2 Citations
Magnetron sputtering
Sputtering
Copper
magnetron sputtering
Evaporation
3 Citations

A comparative study on the properties of chromium coatings deposited by magnetron sputtering with hot and cooled target

Sidelev, D. V., Bleykher, G. A., Bestetti, M., Krivobokov, V. P., Vicenzo, A., Franz, S. & Brunella, M. F., 1 Sep 2017, In : Vacuum. 143, p. 479-485 7 p.

Research output: Contribution to journalArticle

Chromium
Magnetron sputtering
chromium
magnetron sputtering
coatings