• 136 Citations
  • 6 h-Index
1977 …2019
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Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 8 Similar Profiles
magnetron sputtering Physics & Astronomy
Magnetron sputtering Engineering & Materials Science
erosion Physics & Astronomy
Erosion Engineering & Materials Science
Ion beams Engineering & Materials Science
ion beams Physics & Astronomy
Deposition rates Engineering & Materials Science
Sputtering Engineering & Materials Science

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Research Output 1977 2019

  • 136 Citations
  • 6 h-Index
  • 44 Article
  • 2 Conference contribution
  • 1 Conference article

Angular thickness distribution and target utilization for hot Ni target magnetron sputtering

Sidelev, D. V. & Krivobokov, V. P., 1 Feb 2019, In : Vacuum. 160, p. 418-420 3 p.

Research output: Contribution to journalArticle

Magnetron sputtering
Sputtering
magnetron sputtering
Deposition rates
Film thickness
1 Citations
Magnetron sputtering
Deposition rates
magnetron sputtering
Substrates
Sublimation
4 Citations
ferromagnetic films
Magnetron sputtering
Sputtering
magnetron sputtering
sputtering
metal coatings
magnetron sputtering
corrosion tests
nanoindentation
flux (rate)
1 Citations
Deposition rates
Magnetron sputtering
erosion
Sputtering
Erosion