• 147 Citations
  • 7 h-Index
1977 …2019
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  • 7 Similar Profiles
magnetron sputtering Physics & Astronomy
Magnetron sputtering Engineering & Materials Science
erosion Physics & Astronomy
Erosion Engineering & Materials Science
Ion beams Engineering & Materials Science
ion beams Physics & Astronomy
Deposition rates Engineering & Materials Science
coatings Physics & Astronomy

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Research Output 1977 2019

  • 147 Citations
  • 7 h-Index
  • 44 Article
  • 2 Conference contribution
  • 1 Conference article
2 Citations (Scopus)

Angular thickness distribution and target utilization for hot Ni target magnetron sputtering

Sidelev, D. V. & Krivobokov, V. P., 1 Feb 2019, In : Vacuum. 160, p. 418-420 3 p.

Research output: Contribution to journalArticle

Magnetron sputtering
Sputtering
magnetron sputtering
Deposition rates
Film thickness
Nuclear fuel cladding
nuclear fuels
Chromium
accidents
Nickel
2 Citations (Scopus)
Magnetron sputtering
Deposition rates
magnetron sputtering
Substrates
Sublimation
5 Citations (Scopus)
ferromagnetic films
Magnetron sputtering
Sputtering
magnetron sputtering
sputtering
metal coatings
magnetron sputtering
corrosion tests
nanoindentation
flux (rate)

Activities 2019 2019

  • 1 Membership of committee