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Research Output 2007 2019

  • 683 Citations
  • 14 h-Index
  • 59 Article
  • 4 Conference contribution
  • 1 Conference article
  • 1 Review article
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Review article
2014
13 Citations (Scopus)

Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

Meszmer, P., Hiller, K., Hartmann, S., Shaporin, A., May, D., Rodriguez, R. D., Arnold, J., Schondelmaier, G., Mehner, J., Zahn, D. R. T. & Wunderle, B., 1 Jan 2014, In : Microsystem Technologies. 20, 6, p. 1041-1050 10 p.

Research output: Contribution to journalReview article

Aluminum
heaters
microelectromechanical systems
MEMS
Actuators