• 12 Citations
  • 1 h-Index
20122020

Research output per year

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Research Output

  • 12 Citations
  • 1 h-Index
  • 3 Conference article
  • 2 Article
  • 1 Conference contribution
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Article
2017

Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

Yuryeva, A. V., Shabunin, A. S., Korzhenko, D. V., Korneva, O. S. & Nikolaev, M. V., 1 Jul 2017, In : Vacuum. 141, p. 135-138 4 p.

Research output: Contribution to journalArticle

10 Citations (Scopus)

Study on the influence of the magnetron power supply on the properties of the Silicon Nitride films

Kiseleva, D. V., Yurjev, Y. N., Petrakov, Y. V., Sidelev, D. V., Korzhenko, D. V. & Erofeev, E. V., 10 Feb 2017, In : Journal of Physics: Conference Series. 789, 1, 012028.

Research output: Contribution to journalArticle

1 Citation (Scopus)