• 115 Citations
  • 6 h-Index
20132020

Research output per year

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Research Output

  • 115 Citations
  • 6 h-Index
  • 20 Article
  • 2 Conference contribution
  • 2 Conference article
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Conference article
2018

Operation parameters of magnetron diode for high-rate deposition of aluminum films

Sidelev, D. V. & Grudinin, V. A., 27 Nov 2018, In : Journal of Physics: Conference Series. 1115, 3, 032020.

Research output: Contribution to journalConference article