• 113 Citations
  • 6 h-Index
20132020

Research output per year

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Research Output

  • 113 Citations
  • 6 h-Index
  • 19 Article
  • 2 Conference contribution
  • 2 Conference article
2020
2019

Angular thickness distribution and target utilization for hot Ni target magnetron sputtering

Sidelev, D. V. & Krivobokov, V. P., 1 Feb 2019, In : Vacuum. 160, p. 418-420 3 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)
3 Citations (Scopus)
4 Citations (Scopus)
1 Citation (Scopus)
2018
6 Citations (Scopus)
9 Citations (Scopus)

Operation parameters of magnetron diode for high-rate deposition of aluminum films

Sidelev, D. V. & Grudinin, V. A., 27 Nov 2018, In : Journal of Physics: Conference Series. 1115, 3, 032020.

Research output: Contribution to journalConference article

4 Citations (Scopus)
5 Citations (Scopus)
2017

A comparative study on the properties of chromium coatings deposited by magnetron sputtering with hot and cooled target

Sidelev, D. V., Bleykher, G. A., Bestetti, M., Krivobokov, V. P., Vicenzo, A., Franz, S. & Brunella, M. F., 1 Sep 2017, In : Vacuum. 143, p. 479-485 7 p.

Research output: Contribution to journalArticle

11 Citations (Scopus)

Study on the influence of the magnetron power supply on the properties of the Silicon Nitride films

Kiseleva, D. V., Yurjev, Y. N., Petrakov, Y. V., Sidelev, D. V., Korzhenko, D. V. & Erofeev, E. V., 10 Feb 2017, In : Journal of Physics: Conference Series. 789, 1, 012028.

Research output: Contribution to journalArticle

1 Citation (Scopus)
2016
5 Citations (Scopus)

Antifriction coatings based on a-C for biomedicine applications

Yurjev, Y. N., Kiseleva, D. V., Zaitcev, D. A., Sidelev, D. V. & Korneva, O. S., 14 Jan 2016, In : Journal of Physics: Conference Series. 669, 1, 012066.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Evaporation factor in productivity increase of hot target magnetron sputtering systems

Bleykher, G. A., Borduleva, A. O., Krivobokov, V. P. & Sidelev, D. V., 1 Oct 2016, In : Vacuum. 132, p. 62-69 8 p.

Research output: Contribution to journalArticle

23 Citations (Scopus)

High-rate magnetron sputtering with hot target

Sidelev, D. V., Bleykher, G. A., Krivobokov, V. P. & Koishybayeva, Z., 31 Mar 2016, (Accepted/In press) In : Surface and Coatings Technology. 308, p. 168-173 6 p.

Research output: Contribution to journalArticle

19 Citations (Scopus)

Magnetron sputtering in rigid optical solar reflectors production

Asainov, O. K., Bainov, D. D., Krivobokov, V. P. & Sidelev, D. V., 25 Jul 2016, In : Journal of Physics: Conference Series. 729, 1, 012012.

Research output: Contribution to journalArticle

Magnetron sputtering with hot solid target: Thermal processes and erosion

Borduleva, A. O., Bleykher, G. A., Sidelev, D. V. & Krivobokov, V. P., 2016, In : Acta Polytechnica. 56, 6, p. 425-431 7 p.

Research output: Contribution to journalArticle

The oxygen-deficient TiO2 films deposited by a dual magnetron sputtering

Sidelev, D. V., Yurjev, Y. N., Krivobokov, V. P., Erofeev, E. V., Penkova, O. V. & Novikov, V. A., 1 Dec 2016, In : Vacuum. 134, p. 29-32 4 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)
2014

Effect of magnetic field configuration of dual magnetron on carbon based films properties

Yurjev, Y. N., Zaitcev, D. A., Sidelev, D. V. & Tupikova, O. S., 2014, Advanced Materials Research. Trans Tech Publications Ltd, Vol. 1040. p. 721-725 5 p. (Advanced Materials Research; vol. 1040).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

The reactive deposition of TiOx thin films

Sidelev, D. V. & Yurjev, Y. N., 2014, Advanced Materials Research. Trans Tech Publications Ltd, Vol. 1040. p. 748-752 5 p. (Advanced Materials Research; vol. 1040).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
2013
5 Citations (Scopus)