Research Output per year
Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.
- 33 Similar Profiles
magnetron sputtering
Physics & Astronomy
Magnetron sputtering
Engineering & Materials Science
Deposition rates
Engineering & Materials Science
Sputtering
Engineering & Materials Science
coatings
Physics & Astronomy
sputtering
Physics & Astronomy
Evaporation
Engineering & Materials Science
Coatings
Engineering & Materials Science
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 2013 2019
Angular thickness distribution and target utilization for hot Ni target magnetron sputtering
Sidelev, D. V. & Krivobokov, V. P., 1 Feb 2019, In : Vacuum. 160, p. 418-420 3 p.Research output: Contribution to journal › Article
Magnetron sputtering
Sputtering
magnetron sputtering
Deposition rates
Film thickness
1
Citations
Deposition of Cr films by hot target magnetron sputtering on biased substrates
Sidelev, D. V., Bestetti, M., Bleykher, G. A., Krivobokov, V. P., Grudinin, V. A., Franz, S., Vicenzo, A. & Shanenkova, Y. L., 25 Sep 2018, In : Surface and Coatings Technology. 350, p. 560-568 9 p.Research output: Contribution to journal › Article
Magnetron sputtering
Deposition rates
magnetron sputtering
Substrates
Sublimation
4
Citations
Hot target magnetron sputtering for ferromagnetic films deposition
Sidelev, D. V., Bleykher, G. A., Grudinin, V. A., Krivobokov, V. P., Bestetti, M., Syrtanov, M. S. & Erofeev, E. V., 25 Jan 2018, In : Surface and Coatings Technology. 334, p. 61-70 10 p.Research output: Contribution to journal › Article
ferromagnetic films
Magnetron sputtering
Sputtering
magnetron sputtering
sputtering
Operation parameters of magnetron diode for high-rate deposition of aluminum films
Sidelev, D. V. & Grudinin, V. A., 27 Nov 2018, In : Journal of Physics: Conference Series. 1115, 3, 032020.Research output: Contribution to journal › Conference article
diodes
high impulse
aluminum
transit
power supplies
Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets
Bleykher, G. A., Sidelev, D. V., Grudinin, V. A., Krivobokov, V. P. & Yuryeva, A. V., 27 Nov 2018, In : Journal of Physics: Conference Series. 1115, 3, 032065.Research output: Contribution to journal › Conference article
metal coatings
magnetron sputtering
corrosion tests
nanoindentation
flux (rate)
Activities 2017 2017
- 1 Participation in conference
International Conference on Ion-Surface Interactions (ISI-2017)
Sergey Ivanovich Kuznetsov (Participant), Egor Borisovich Kashkarov (Participant), Dmitrii Vladimirovich Sidelev (Participant)21 Aug 2017 → 25 Aug 2017
Activity: Participating in or organising an event types › Participation in conference
Prizes
Премии Томской области в сфере образования, науки, здравоохранения и культуры
Marina Evgenievna Trusova (Recipient), Roman Anatolievich Surmenev (Recipient), Gennady Sergeevich Evtushenko (Recipient), Mikhail Vladimirovich Andreev (Recipient), Arseny Olegovich Chulkov (Recipient), Natalia Evgenievna Shakhova (Recipient), Alexander Vladimirovich Astafev (Recipient), Irina Alekseevna Miloichikova (Recipient), Oleg Khaidarovich Asainov (Recipient), Leonid Vladimirovich Kapilevich (Recipient), Massimiliano Bestetti (Recipient), Galina Alexeevna Bleykher (Recipient), Alena Victorovna Yuryeva (Recipient), Natalia Sergeevna Kuznetsova (Recipient), Egor Grigorievich Yazikov (Recipient), Yuriy Nikolaevich Yurjev (Recipient), Valery Pavlovich Krivobokov (Recipient), Nina Alexandrovna Osipova (Recipient), Ekaterina Anatolievna Filimonenko (Recipient) & Dmitrii Vladimirovich Sidelev (Recipient), 2017
Prize: Honorary award