• 55 Citations
  • 4 h-Index
20132019
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Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 33 Similar Profiles
magnetron sputtering Physics & Astronomy
Magnetron sputtering Engineering & Materials Science
Deposition rates Engineering & Materials Science
Sputtering Engineering & Materials Science
coatings Physics & Astronomy
sputtering Physics & Astronomy
Evaporation Engineering & Materials Science
Coatings Engineering & Materials Science

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Research Output 2013 2019

  • 55 Citations
  • 4 h-Index
  • 15 Article
  • 2 Conference contribution
  • 2 Conference article

Angular thickness distribution and target utilization for hot Ni target magnetron sputtering

Sidelev, D. V. & Krivobokov, V. P., 1 Feb 2019, In : Vacuum. 160, p. 418-420 3 p.

Research output: Contribution to journalArticle

Magnetron sputtering
Sputtering
magnetron sputtering
Deposition rates
Film thickness
1 Citations
Magnetron sputtering
Deposition rates
magnetron sputtering
Substrates
Sublimation
4 Citations
ferromagnetic films
Magnetron sputtering
Sputtering
magnetron sputtering
sputtering

Operation parameters of magnetron diode for high-rate deposition of aluminum films

Sidelev, D. V. & Grudinin, V. A., 27 Nov 2018, In : Journal of Physics: Conference Series. 1115, 3, 032020.

Research output: Contribution to journalConference article

diodes
high impulse
aluminum
transit
power supplies
metal coatings
magnetron sputtering
corrosion tests
nanoindentation
flux (rate)

Activities 2017 2017

  • 1 Participation in conference

International Conference on Ion-Surface Interactions (ISI-2017)

Sergey Ivanovich Kuznetsov (Participant), Egor Borisovich Kashkarov (Participant), Dmitrii Vladimirovich Sidelev (Participant)
21 Aug 201725 Aug 2017

Activity: Participating in or organising an event typesParticipation in conference