• 75 Citations
  • 5 h-Index
20122019
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Research Output 2012 2019

  • 75 Citations
  • 5 h-Index
  • 9 Article
  • 1 Conference contribution
  • 1 Conference article
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Article
2019
Magnetron sputtering
magnetron sputtering
Sputtering
Liquids
liquids
2018
5 Citations (Scopus)
Magnetron sputtering
Sputtering
Copper
magnetron sputtering
Evaporation
2017
10 Citations (Scopus)

Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

Yuryeva, A. V., Shabunin, A. S., Korzhenko, D. V., Korneva, O. S. & Nikolaev, M. V., 1 Jul 2017, In : Vacuum. 141, p. 135-138 4 p.

Research output: Contribution to journalArticle

Crucibles
crucibles
Deposition rates
Magnetron sputtering
magnetron sputtering
13 Citations (Scopus)

Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target

Bleykher, G. A., Borduleva, A. O., Yuryeva, A. V., Krivobokov, V. P., Lančok, J., Bulíř, J., Drahokoupil, J., Klimša, L., Kopeček, J., Fekete, L., Čtvrtlìk, R. & Tomaštik, J., 15 Sep 2017, In : Surface and Coatings Technology. 324, p. 111-120 10 p.

Research output: Contribution to journalArticle

liquid metals
Deposition rates
Liquid metals
Magnetron sputtering
Copper
2016
4 Citations (Scopus)
magnetron sputtering
aluminum
direct current
optical emission spectroscopy
power supplies
19 Citations (Scopus)

Energy and substance transfer in magnetron sputtering systems with liquid-phase target

Bleykher, G. A., Krivobokov, V. P., Yuryeva, A. V. & Sadykova, I., 1 Feb 2016, In : Vacuum. 124, p. 11-17 7 p.

Research output: Contribution to journalArticle

Magnetron sputtering
magnetron sputtering
liquid phases
energy transfer
Metal coatings
2015
15 Citations (Scopus)

Magnetron deposition of coatings with evaporation of the target

Bleykher, G. A., Krivobokov, V. P. & Yuryeva, A. V., 1 Dec 2015, In : Technical Physics. 60, 12, p. 1790-1795 6 p.

Research output: Contribution to journalArticle

evaporation
coatings
magnetrons
metal coatings
conductive heat transfer
5 Citations (Scopus)
magnetron sputtering
liquid phases
atoms
plasma generators
erosion
2013
3 Citations (Scopus)
metal surfaces
erosion
Erosion
Irradiation
Ion beams