Research Output per year
Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.
- 36 Similar Profiles
magnetron sputtering
Physics & Astronomy
Magnetron sputtering
Engineering & Materials Science
liquid phases
Physics & Astronomy
Copper
Chemical Compounds
Deposition rates
Engineering & Materials Science
erosion
Physics & Astronomy
coatings
Physics & Astronomy
evaporation
Physics & Astronomy
Network
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Research Output 2013 2018
- 49 Citations
- 4 h-Index
- 8 Article
2
Citations
The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering
Bleykher, G. A., Yuryeva, A. V., Shabunin, A. S., Krivobokov, V. P. & Sidelev, D. V., 1 Jun 2018, In : Vacuum. 152, p. 156-165 10 p.Research output: Contribution to journal › Article
Magnetron sputtering
Sputtering
Copper
magnetron sputtering
Evaporation
4
Citations
Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target
Yuryeva, A. V., Shabunin, A. S., Korzhenko, D. V., Korneva, O. S. & Nikolaev, M. V., 1 Jul 2017, In : Vacuum. 141, p. 135-138 4 p.Research output: Contribution to journal › Article
Crucibles
crucibles
Deposition rates
Magnetron sputtering
magnetron sputtering
5
Citations
Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target
Bleykher, G. A., Borduleva, A. O., Yuryeva, A. V., Krivobokov, V. P., Lančok, J., Bulíř, J., Drahokoupil, J., Klimša, L., Kopeček, J., Fekete, L., Čtvrtlìk, R. & Tomaštik, J., 15 Sep 2017, In : Surface and Coatings Technology. 324, p. 111-120 10 p.Research output: Contribution to journal › Article
liquid metals
Deposition rates
Liquid metals
Magnetron sputtering
Copper
2
Citations
Aluminum films deposition by magnetron sputtering systems: Influence of target state and pulsing unit
Sidelev, D. V., Yuryeva, A. V., Krivobokov, V. P., Shabunin, A. S., Syrtanov, M. S. & Koishybayeva, Z., 15 Sep 2016, In : Journal of Physics: Conference Series. 741, 1, 012193.Research output: Contribution to journal › Article
magnetron sputtering
aluminum
direct current
optical emission spectroscopy
power supplies
16
Citations
Energy and substance transfer in magnetron sputtering systems with liquid-phase target
Bleykher, G. A., Krivobokov, V. P., Yuryeva, A. V. & Sadykova, I., 1 Feb 2016, In : Vacuum. 124, p. 11-17 7 p.Research output: Contribution to journal › Article
Magnetron sputtering
magnetron sputtering
liquid phases
energy transfer
Metal coatings
Prizes
Премии Томской области в сфере образования, науки, здравоохранения и культуры
Marina Evgenievna Trusova (Recipient), Roman Anatolievich Surmenev (Recipient), Gennady Sergeevich Evtushenko (Recipient), Mikhail Vladimirovich Andreev (Recipient), Arseny Olegovich Chulkov (Recipient), Natalia Evgenievna Shakhova (Recipient), Alexander Vladimirovich Astafev (Recipient), Irina Alekseevna Miloichikova (Recipient), Oleg Khaidarovich Asainov (Recipient), Leonid Vladimirovich Kapilevich (Recipient), Massimiliano Bestetti (Recipient), Galina Alexeevna Bleykher (Recipient), Alena Victorovna Yuryeva (Recipient), Natalia Sergeevna Kuznetsova (Recipient), Egor Grigorievich Yazikov (Recipient), Yuriy Nikolaevich Yurjev (Recipient), Valery Pavlovich Krivobokov (Recipient), Nina Alexandrovna Osipova (Recipient), Ekaterina Anatolievna Filimonenko (Recipient) & Dmitrii Vladimirovich Sidelev (Recipient), 2017
Prize: Honorary award