Research Output per year
Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.
- 23 Similar Profiles
magnetron sputtering
Physics & Astronomy
Magnetron sputtering
Engineering & Materials Science
liquid phases
Physics & Astronomy
metal coatings
Physics & Astronomy
Copper
Chemical Compounds
coatings
Physics & Astronomy
Deposition rates
Engineering & Materials Science
erosion
Physics & Astronomy
Network
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Research Output 2012 2018
Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets
Bleykher, G. A., Sidelev, D. V., Grudinin, V. A., Krivobokov, V. P. & Yuryeva, A. V., 27 Nov 2018, In : Journal of Physics: Conference Series. 1115, 3, 032065.Research output: Contribution to journal › Conference article
metal coatings
magnetron sputtering
corrosion tests
nanoindentation
flux (rate)
2
Citations
(Scopus)
The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering
Bleykher, G. A., Yuryeva, A. V., Shabunin, A. S., Krivobokov, V. P. & Sidelev, D. V., 1 Jun 2018, In : Vacuum. 152, p. 156-165 10 p.Research output: Contribution to journal › Article
Magnetron sputtering
Sputtering
Copper
magnetron sputtering
Evaporation
6
Citations
(Scopus)
Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target
Yuryeva, A. V., Shabunin, A. S., Korzhenko, D. V., Korneva, O. S. & Nikolaev, M. V., 1 Jul 2017, In : Vacuum. 141, p. 135-138 4 p.Research output: Contribution to journal › Article
Crucibles
crucibles
Deposition rates
Magnetron sputtering
magnetron sputtering
9
Citations
(Scopus)
Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target
Bleykher, G. A., Borduleva, A. O., Yuryeva, A. V., Krivobokov, V. P., Lančok, J., Bulíř, J., Drahokoupil, J., Klimša, L., Kopeček, J., Fekete, L., Čtvrtlìk, R. & Tomaštik, J., 15 Sep 2017, In : Surface and Coatings Technology. 324, p. 111-120 10 p.Research output: Contribution to journal › Article
liquid metals
Deposition rates
Liquid metals
Magnetron sputtering
Copper
3
Citations
(Scopus)
Aluminum films deposition by magnetron sputtering systems: Influence of target state and pulsing unit
Sidelev, D. V., Yuryeva, A. V., Krivobokov, V. P., Shabunin, A. S., Syrtanov, M. S. & Koishybayeva, Z., 15 Sep 2016, In : Journal of Physics: Conference Series. 741, 1, 012193.Research output: Contribution to journal › Article
magnetron sputtering
aluminum
direct current
optical emission spectroscopy
power supplies
Prizes
Премии Томской области в сфере образования, науки, здравоохранения и культуры
Marina Evgenievna Trusova (Recipient), Roman Anatolievich Surmenev (Recipient), Gennady Sergeevich Evtushenko (Recipient), Mikhail Vladimirovich Andreev (Recipient), Arseny Olegovich Chulkov (Recipient), Natalia Evgenievna Shakhova (Recipient), Alexander Vladimirovich Astafev (Recipient), Irina Alekseevna Miloichikova (Recipient), Oleg Khaidarovich Asainov (Recipient), Leonid Vladimirovich Kapilevich (Recipient), Massimiliano Bestetti (Recipient), Galina Alexeevna Bleykher (Recipient), Alena Victorovna Yuryeva (Recipient), Natalia Sergeevna Kuznetsova (Recipient), Egor Grigorievich Yazikov (Recipient), Yuriy Nikolaevich Yurjev (Recipient), Valery Pavlovich Krivobokov (Recipient), Nina Alexandrovna Osipova (Recipient), Ekaterina Anatolievna Filimonenko (Recipient) & Dmitrii Vladimirovich Sidelev (Recipient), 2017
Prize: Honorary award