• 49 Citations
  • 4 h-Index
20132018
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Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 36 Similar Profiles
magnetron sputtering Physics & Astronomy
Magnetron sputtering Engineering & Materials Science
liquid phases Physics & Astronomy
Copper Chemical Compounds
Deposition rates Engineering & Materials Science
erosion Physics & Astronomy
coatings Physics & Astronomy
evaporation Physics & Astronomy

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Research Output 2013 2018

  • 49 Citations
  • 4 h-Index
  • 8 Article
2 Citations
Magnetron sputtering
Sputtering
Copper
magnetron sputtering
Evaporation
4 Citations

Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

Yuryeva, A. V., Shabunin, A. S., Korzhenko, D. V., Korneva, O. S. & Nikolaev, M. V., 1 Jul 2017, In : Vacuum. 141, p. 135-138 4 p.

Research output: Contribution to journalArticle

Crucibles
crucibles
Deposition rates
Magnetron sputtering
magnetron sputtering
5 Citations

Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target

Bleykher, G. A., Borduleva, A. O., Yuryeva, A. V., Krivobokov, V. P., Lančok, J., Bulíř, J., Drahokoupil, J., Klimša, L., Kopeček, J., Fekete, L., Čtvrtlìk, R. & Tomaštik, J., 15 Sep 2017, In : Surface and Coatings Technology. 324, p. 111-120 10 p.

Research output: Contribution to journalArticle

liquid metals
Deposition rates
Liquid metals
Magnetron sputtering
Copper
2 Citations
magnetron sputtering
aluminum
direct current
optical emission spectroscopy
power supplies
16 Citations

Energy and substance transfer in magnetron sputtering systems with liquid-phase target

Bleykher, G. A., Krivobokov, V. P., Yuryeva, A. V. & Sadykova, I., 1 Feb 2016, In : Vacuum. 124, p. 11-17 7 p.

Research output: Contribution to journalArticle

Magnetron sputtering
magnetron sputtering
liquid phases
energy transfer
Metal coatings