International Conference on Surface Modification of Materials by Ion Beams

Nurken Erbolatovich Aktaev (Participant), Stepanov, I. B. (Participant)

Activity: Participating in or organising an event types › Participation in conference

Period	23 Nov 2015 → 27 Nov 2015
Event type	Conference
Conference number	19
Location	Chiang Mai, Thailand
Degree of Recognition	International

Keywords

ion beams

Documents & Links

Actaev N. "Modeling of carbon penetration into silicon structure under the action of pulsed high-intensity ion beam"
Stepanov I.:"Tangential cathode magnetic field and substrate bias influence on copper vacuum arc macroparticle content decreasing"

Related content

Research Output

Modeling of carbon penetration into silicon structure under the action of pulsed high-intensity ion beam

Research output: Contribution to journal › Article

Tangential cathode magnetic field and substrate bias influence on copper vacuum arc macroparticle content decreasing

Research output: Contribution to journal › Article